PROBE CARD FOR EDS TEST

摘要

PURPOSE: A probe card for EDS test is provided to prevent a wafer contact error during an EDS test process and enhance the productivity by fixing a probe to a Z-axis. CONSTITUTION: A probe card for EDS test includes a bottom plate, a PCB assembly(20), a support frame(30), a space transformer(60), an interposer, a transformer support member(50), and a displacement-blocking member(65). The bottom plate is adhered at a bottom side of a tester. The PCB assembly(20) is installed at a bottom of the bottom plate. A PCB is loaded on the PCB assembly. The support frame(30) is used for supporting a bottom of the PCB assembly. The space transformer(60) is installed at a bottom of the support frame. The space transformer(60) includes a probe part corresponding to a chip of a semiconductor substrate. The interposer is inserted between the space transformer and the PCB assembly. The transformer support member(50) is used for adhering and supporting the spacer transformer(60) to the PCB assembly. The displacement-blocking member(65) is used for preventing the displacement to a Z-axis.