ORGANOSILICATE POLYMER AND INSULATING LAYER CONTAINING THE POLYMER

摘要

PURPOSE: An organosilicate polymer, a coating composition containing the polymer for an insulating layer, an insulating layer prepared by using the composition, its preparation method and a semiconductor device containing the insulating layer are provided, to improve the mechanical properties and the insulating property. CONSTITUTION: The organosilicate polymer is prepared mixing (a) a compound selected from the group consisting of an unsaturated organosilane, a radical reaction product of an unsaturated organosilane and their mixture, or (b) a mixture of a compound selected from the group consisting of an unsaturated organosilane, a radical reaction product of an unsaturated organosilane and their mixture and a silane compound or a silane oligomer, with an organic solvent; and adding water and a catalyst to the mixture to hydrolyze and condense it. Preferably the unsaturated organosilane is represented by SiR1pR2(4-p), wherein the each R1 is independently an alkenyl group of C1-C10; the each R2 is independently an acetoxy group, a hydroxyl group, or a straight or branched alkoxy group of C1-C4; and p is an integer of 1-4.