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发明名称
METHODS AND APPARATUS FOR SCANNED BEAM UNIFORMITY ADJUSTMENT IN ION IMPLANTERS
摘要
申请公布号
KR20040014474(A)
申请公布日期
2004.02.14
申请号
KR20037012327
申请日期
2003.09.22
申请人
发明人
分类号
H01J37/04;H01J37/317;G21K1/08;H01J37/304;H01L21/265
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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