REAL-TIME INFORMATION SYSTEM OF ABNORMAL SIGNAL OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A real-time information system of an abnormal signal of semiconductor fabricating equipment is provided to inform an engineer of the abnormal signal occurring from the semiconductor fabricating equipment in real time by automatically detecting whether the semiconductor fabricating equipment malfunctions or breaks down. CONSTITUTION: A signal conversion apparatus(10) converts an abnormal signal occurring in the semiconductor fabricating equipment into an electrical signal. A transmission apparatus(20) transmits the electrical signal. A display apparatus(30) in the outside of a semiconductor fabricating line receives the electrical signal from the transmission apparatus and displays the electrical signal.