发明名称 |
CONTACTING COMPONENT, METHOD OF PRODUCING THE SAME, AND TEST TOOL HAVING CONTACTING COMPONENT |
摘要 |
PURPOSE: A contacting component and a method of producing the same are provided to obtain a probe contact having good hardness and resistance of broken by controlling the size of particle and the content of carbon in the probe contact. CONSTITUTION: An insulating substrate(1) with a conductive metal film(4) is prepared. A through-hole(5) is formed. A probe contact(2) is formed by plating and adapted to be contacted with a target portion. The probe contact is made of a polycrystalline material having a crystal grain size not smaller than 10 nm and not greater than 40 nm. |
申请公布号 |
KR20040014299(A) |
申请公布日期 |
2004.02.14 |
申请号 |
KR20030054325 |
申请日期 |
2003.08.06 |
申请人 |
HOYA CORPORATION |
发明人 |
SUGIHARA OSAMU |
分类号 |
H01L21/66;G01R1/073;G01R3/00;H05K1/09;H05K3/40;H05K3/42;(IPC1-7):H01L21/66 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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