发明名称 CONTACTING COMPONENT, METHOD OF PRODUCING THE SAME, AND TEST TOOL HAVING CONTACTING COMPONENT
摘要 PURPOSE: A contacting component and a method of producing the same are provided to obtain a probe contact having good hardness and resistance of broken by controlling the size of particle and the content of carbon in the probe contact. CONSTITUTION: An insulating substrate(1) with a conductive metal film(4) is prepared. A through-hole(5) is formed. A probe contact(2) is formed by plating and adapted to be contacted with a target portion. The probe contact is made of a polycrystalline material having a crystal grain size not smaller than 10 nm and not greater than 40 nm.
申请公布号 KR20040014299(A) 申请公布日期 2004.02.14
申请号 KR20030054325 申请日期 2003.08.06
申请人 HOYA CORPORATION 发明人 SUGIHARA OSAMU
分类号 H01L21/66;G01R1/073;G01R3/00;H05K1/09;H05K3/40;H05K3/42;(IPC1-7):H01L21/66 主分类号 H01L21/66
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