SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: Semiconductor fabricating equipment is provided to smoothly perform a process even if a leak occurs by sealing both sides of a gate that interconnects chambers. CONSTITUTION: A wafer stands by in a load lock chamber. Process surroundings of a predetermined condition is embodied in a process chamber(300) to perform a predetermined process on the wafer. A wafer transfer robot is installed in a transfer chamber(200) to transfer the wafer in the load lock chamber to the process chamber. The gate(500) interconnects the load lock chamber, the process chamber and the transfer chamber so that the wafer can be transferred through the gate. A gate valve unit(400) for multi-sealing of the gate is mounted on the gate.