GATE VALVE OF SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A gate valve of semiconductor fabricating equipment is provided to minimize the generation of leak by perfectly sealing a pipe by a pair of valve plates so that a sealing operation is completely carried out even if the pipe is used for a long time. CONSTITUTION: A sealing part(2) as a sealing structure is connected to a connection part between pipes. The valve plates(33,33') in which an operation link(31) is coupled to an operation axis are installed in an operation part(3) to seal the sealing part. A cylinder for operating the operation ling is embodied in a drive part. The operation axis connecting the valve plates with the operation link is formed of a dual operation axis(32) including two axes. The pair of valve plates are fixedly coupled to each other through the dual operation axis.