METHOD FOR OPERATING SEMICONDUCTOR FABRICATION APPARATUS HAVING IMPROVED INTERLOCK FUNCTION

摘要

PURPOSE: A method for operating a semiconductor fabrication apparatus having an improved interlock function is provided to prevent errors of the interlock system by checking each registration state of various variables. CONSTITUTION: An initialization process is performed to operate a semiconductor fabrication apparatus(110). An interlock system of the semiconductor fabrication apparatus is checked in the initialization process of the semiconductor fabrication apparatus. In order to check the interlock system of the semiconductor fabrication apparatus, the registering states of various variables for operating the interlock system are checked(120). An operation of the semiconductor fabrication apparatus is stopped if the various variables are not registered normally into the interlock system(140).