| 摘要 |
PURPOSE: An optimally cut surface acoustic wave(SAW) device and a method for the same are provided to give an optimum cutting orientation angle for applying quartz as a single crystal substrate to the temperature sensor, thereby obtaining an optimum parameter. CONSTITUTION: An optimally cut surface acoustic wave(SAW) device includes a quartz substrate and an input and output interdigital transducer(IDT) provided with an electrode. The electrode is formed on the surface of the substrate for generating and detecting the surface acoustic wave(SAW) on the substrate. One direction of the SAW exists along the X' axis and the substrate exists along the Z' axis perpendicular to the X' axis and along the surface thereof. The surface of has the orientation of crystal defined by quartz axes X, Y and Z. The relative orientation of the X', Y' and Z' of the crystal is determined by the Euler angles &phgr;, &thgr; and ψ. And, &phgr; is ranging from -5° to +5°, &thgr; is ranging from 60° to 80° and ψ is ranging from -5° to +5°. |
