CONDUCTIVE CERAMIC ELECTRODE AND ELECTROSTATIC CHUCK INCLUDING THE SAME

摘要

PURPOSE: A conductive ceramic electrode is provided to obtain uniform and strong absorption power by making a conductive ceramic electrode formed of a conductive ceramic material including titanium such that the conductive ceramic electrode is of a plate type to generate a uniform electric field. CONSTITUTION: An electrode(20) is composed of a conductive ceramic material including titanium. The conductive ceramic material is a mixture composed of titanium nitride and aluminum nitride wherein the aluminum nitride is 5-50 weight percent of the titanium nitride.