WAFER CARRIER APPARATUS FOR SPINNER EQUIPMENT HAVING IMPROVED ARM TRANSFER UNIT

摘要

PURPOSE: A wafer carrier apparatus for spinner equipment having an improved arm transfer unit is provided to prevent the generation of particles caused by the frictional force by using a magnetic levitation method. CONSTITUTION: A wafer carrier apparatus for spinner equipment having an improved arm transfer unit includes an indexer, a coater, a developer, an interface, and arm. The indexer is used for loading and unloading a wafer. The coater is used for coating a surface of the wafer. The developer is used for developing an exposed wafer. The interface is used for performing an interaction with an exposure device. The arm is used for loading the wafer to each other or unloading the wafer from each part. The arm is transferred by a magnetic levitation transfer unit(10).