To coat a transparent plastics pane, by chemical vapor deposition plasma, the substrate is heated to a level of 20oC below the maximum temperature where the plastics starts to degrade

摘要

To coat a transparent plastics pane substrate, it is applied by chemical vapor deposition (CVD) plasma at the maximum temperature which can be used for the substrate before it degrades -20degreesC. The coating material is based on silicon, oxygen, carbon, hydrogen using one of a number of precursors e.g. silane, hexamethyldisiloxane, tetramethyldisiloxane, etc.