VAPOR DEPOSITION MATERIAL, MgO VAPOR DEPOSITION MATERIAL AND ITS MANUFACTURING PROCESS, DEPOSITION PROCESS

摘要

PROBLEM TO BE SOLVED: To acceralate vapor deposition speed and to improve controllability of the vapor deposition speed when vapor deposition is applied by an electron-beam vapor deposition process. SOLUTION: A surface roughness Ra of a vapor deposition material is set to 1.0-10μm. A real surface area in consideration of an irregularity of the surface of the vapor deposition material is set 200-1,200 mm2. It is desirable to set a value of outside volume to 30-1,500 mm3. COPYRIGHT: (C)2004,JPO