| 发明名称 |
Stripping agent composition and method of stripping |
| 摘要 |
A stripping composition comprising (a) an anticorrosive agent, (b) a stripping agent and (c) a solvent, wherein the anticorrosive agent (a) is a heterocyclic compound having a nitrogen atom-containing six-membered ring.
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| 申请公布号 |
US2004029051(A1) |
申请公布日期 |
2004.02.12 |
| 申请号 |
US20020312415 |
申请日期 |
2002.12.26 |
| 申请人 |
KOITA TATSUYA;HIRANO KEIJI;AOKI HIDEMITSU;TOMIMORI HIROAKI |
发明人 |
KOITA TATSUYA;HIRANO KEIJI;AOKI HIDEMITSU;TOMIMORI HIROAKI |
| 分类号 |
C11D7/32;C11D11/00;G03F7/42;H01L21/02;H01L21/306;H01L21/311;H01L21/768;(IPC1-7):G03F7/26 |
主分类号 |
C11D7/32 |
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