| 摘要 |
PROBLEM TO BE SOLVED: To reduce the wear of a component member by rotating a retaining member with low frictional force while preventing the dislocation of a support. SOLUTION: In the substrate holder in which a substrate W is arranged between a fixed holding member 54 and a movable holding member 58 fitted with sealing members 62 and 68, a retaining member 60 is moved, and the movable holding member 58 is tightened on the fixed holding member 54 to hold the substrate W. In this case, the retaining member 60 is moved in a state where the movable holding member 58 is pressed against the fixed holding member 54 and the sealing members 62 and 68 are crushed to hold the substrate W. COPYRIGHT: (C)2004,JPO
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