THIN FILM MANUFACTURING METHOD, AND OBJECT MANUFACTURED BY USING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent impartment of damage to a processed fine hole when introducing a raw material by eliminating a gas-liquid interface becoming a hindering factor when introducing the raw material into the fine hole. SOLUTION: This invention solves the problem of bubbles caused by surface tension by vanishing the gas-liquid interface by putting a raw material-dissolved solvent in a supercritical state. Since both the thin film raw material and the solvent become fluid close to gas having low viscosity by putting the solvent in the supercritical state, intrusion into a fine port is quickly caused. The gas-liquid interface is formed again, and is efficiently contacted with the inside of the fine hole by a small quantity of thin film raw materials by putting the fine hole in a state of being soaked in a raw material-dissolved liquid. Since the raw material is introduced after pressures of a thin film manufacturing tank and a raw material solution or a raw material fluid coincide when introducing the raw material, the fine hole is not broken down by a sudden pressure difference. COPYRIGHT: (C)2004,JPO