| 摘要 |
PROBLEM TO BE SOLVED: To remove a film on a substrate with a high accuracy by spraying a solvent onto the unwanted film and transferring it. SOLUTION: The film removing apparatus brings the substrate with a film supported by a substrate with a film into contact with a cleaning blade, sprays the solvent onto the unwanted film with a solvent discharging means, and removes the unwanted film from at least one of the cleaning blade and the substrate. COPYRIGHT: (C)2004,JPO
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