| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To extract and correct a circuit parameter in order to correct a difference between the design value and the finish value of a circuit constant caused when the pattern finish value is different from the design value since the wave length of an exposure light becomes equal to a pattern width to cause the reflection and interference of the exposure light. <P>SOLUTION: The circuit parameter extracting device includes: a step 112B being a means for determining whether the extracted design value DD3 of a gate electrode inter-wiring distance is larger than a stipulated value h or not; a step 114B being a means for determining the existence of influence by the reflection and interference of the exposure light in the case of DD3≤h, and calculating the finish value LP3 with respect to the design value LD3 (=g) of a gate electrode wiring width by a predetermined coefficientδ3 (0<δ3<1) through the use of a formula LP3=g-δ3g; and a step 113B being a means for deciding L3=LP3 concerning the finish value L3 of a gate length being the width of the gate electrode wiring 1, i.e., the circuit parameter when DD3≤h, and deciding L3=LD3 when DD3>h. <P>COPYRIGHT: (C)2004,JPO</p> |
