| 摘要 |
PROBLEM TO BE SOLVED: To obtain a method of cleaning microstructure with an excellent cleaning effect by finding a cleaning component which exhibits high detergency when the component is added to a liquid carbon dioxide. SOLUTION: The method by which residues are removed from a microstructure includes a step of preparing a cleaning agent composition containing the carbon dioxide, a cleaning component for removing the residues, an inhibitor for suppressing the generation of liquid residues, and a compatibilizing agent for dissolving the cleaning component and the inhibitor in a fluid-like carbon dioxide under pressure. The method also includes a step of removing the residues from the microstructure by bringing the cleaning agent composition into contact with the microstructure. COPYRIGHT: (C)2004,JPO |
