MULTISPECTRAL MONOLITHIC INFRARED FOCAL PLANE ARRAY DETECTORS

摘要

A plurality of multi-color infrared sensing elements in a monolithic array format is provided. Each element has a multi-layer structure of Group II-VI semiconductor. The unit cell of the integrated detector consists of two co-located detectors, each sensitive to a different infrared wavelength. Elements of the array are multi-color infrared sensing device monolithically connected to the readout electronic circuit (ROIC), both fabricated on a common silicon substrate.