| 摘要 |
PROBLEM TO BE SOLVED: To improve a cooling capacity of a discharge tube as well as a durability and a rate of operation of a device, in case an elastic material such as a silicon rubber is put in between the discharge tube and a cooling water jacket. SOLUTION: The plasma treatment device guiding reaction gas passing inside the discharge tube (22) into a vacuum vessel (10) by exciting it with a microwave given from outside the discharge tube (22) is provided with a cooling water jacket (46) surrounding an outer periphery face of the discharge tube (10) with a given interval, a rectangular heat-resistant elastic material (56) filled in the interval, and a sheet (58) of heat resistance and an excellent thermal conductivity with its one end pinched by the outer periphery face of the discharge tube (10) and the heat-resistant elastic material (56) and the other end pinched between an inner periphery face of the cooling water jacket (46) and the heat-resistant elastic material (56). COPYRIGHT: (C)2004,JPO
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