| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a columnar oscillator for a compact, low-cost piezoelectric oscillating gyroscope, and its manufacturing method facilitating electrode formation and polarization. <P>SOLUTION: In the method of manufacturing the columnar oscillator for the piezoelectric oscillating gyroscope, triangular grooves, trapezoidal grooves, or the like are formed at equal spaces on the surface of a piezoelectric plate, and electrodes are formed on the whole surface and back face of the piezoelectric plate including the groove parts. The high electric field is applied between the electrodes on the back face and surface to polarize the piezoelectric plate in the thickness direction. The surface of the piezoelectric plate is polished to eliminate the surface electrode other than the groove part, and the piezoelectric plate is cut in the thickness direction of the piezoelectric plate and along the triangular grooves or trapezoidal grooves. <P>COPYRIGHT: (C)2004,JPO |
