COATING DEVICE AND ORGANIC ELECTROLUMINESCENCE (EL) COATING DEVICE

摘要

PROBLEM TO BE SOLVED: To suppress clogging of a nozzle to stably inject a liquid material and to increase the working efficiency of a (organic EL) coating device equipped with the nozzle to eject a coating liquid or an organic EL material onto a substrate.

SOLUTION: The inner space SP of a nozzle body 41 constituting the nozzle 4a functions as a passage to pass an organic EL material. A filter 43 is disposed in the inner position on the passage and apart from the orifice 45a disposed at the top end of the nozzle. The filter 43 has filtering accuracy of 10 μm and collects foreign matters and a gelled substance to prevent from reaching to the orifice 45a. Thus, clogging of the orifice 45a due to foreign matters or the like can be surely prevented.

COPYRIGHT: (C)2004,JPO