| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To easily allow offset scan even when X-ray geometry is changed. <P>SOLUTION: This computed tomography device is provided with an X-ray source 1 for emitting an X-ray beam, a rotary table 5 for mounting a specimen 4, and an X-ray detector for detecting at least the sector-like X-ray beam 2 orthogonally crossing a rotary shaft 13 of the rotary table 5 from the X-ray source 1 transmitted through the specimen 4. The computed tomography device for acquiring a cross-sectional image of the specimen 4 based on a plurality of transmission data in the specimen 4 detected respectively by an X-ray detector 3 in a plurality of rotational positions in the rotary table 5 is provided also an x-shift mechanism 8 for shifting the rotary table 5 to a direction of the X-ray beam 2, a y-shift mechanism 7 for shifting the rotary table 5 in a direction crossed with the X-ray beam 2 along a face of the X-ray beam 2, a moving position calculating means for moving the rotation center of the rotary table 5 at least by the y-shift mechanism 7 to the center position on the center line of the offset position/the X-ray beam 2 on a prescribed line near to an edge within the beam 2, and a moving control mens 22. <P>COPYRIGHT: (C)2004,JPO</p> |
