MgO VAPOR DEPOSITION MATERIAL AND ITS MANUFACTURING PROCESS, MANUFACTURING PROCESS OF MgO DEPOSITION FILM

摘要

PROBLEM TO BE SOLVED: To provide a process by which, if deposited by electron-beam deposition process, optimization of relation between splash intensity and deposition (evaporation) rate is achieved while achieving reduction of material cost and productivity improvement. SOLUTION: An MgO purity of MgO vapor deposition material is 99.0% or more and relative density 90.0% or more, and outside volume is 35 mm-1,500 mm. COPYRIGHT: (C)2004,JPO