SINGLE AXIS MANIPULATOR WITH CONTROLLED COMPLIANCE

摘要

A semiconductor test system that includes a tester (150), a material handling unit (100) and a manipulator that positions the tester relative to the material handling unit (100). The manipulator is in the form of a cart that can be wheeled to the material handling unit. The cart is attached to the material handling unit (100) to provide course positioning of the tester relative to the handling unit. Major motion of the test head is constrained to an axis perpendicular to the mating interface of the material handling unit. However, compliant motion, with up to six degrees of freedom, is possible in a complaint zone near the handler. In this way, alignment units on the tester and material handling unit can accurately control the final positioning of the tester relative to the material handling unit.