| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spin-coating device capable of preventing a mask used for spin-coating of a disk from being damaged when cleaning. <P>SOLUTION: The spin-coating device is configured such that a mask is mounted on a disk body placed on a spinner and immediately after spin-coating is carried out, the processes of cleaning, rinsing, and drying are continuously carried out for the single mask removed from the disk body, and the processed mask is continuously supplied to the next spin-coating process. <P>COPYRIGHT: (C)2004,JPO |
