摘要 |
PROBLEM TO BE SOLVED: To prevent a probe from being fused. SOLUTION: This probe card 1 is provided with n pieces of probes 11-1n connected to a semiconductor integrated circuit of a testing object, a fuse 31 of which the one end is connected to the probe 11 out of the probes 11-1n, and n pieces of pads 21-2n connected respectively to the other end of the fuse 31 and the (n-1) pieces of probes 12-1n. COPYRIGHT: (C)2004,JPO
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