SPECTROSCOPIC DETECTOR FOR PLASMA TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a spectroscopic detector of a plasma treatment apparatus capable of conducting precise treatment to samples. SOLUTION: A plasma 7 is generated in a treatment chamber, and generated plasma is used to apply treatment to a sample housed in the treatment chamber. A diffraction grating 23 introduces plasma emission for spectrometry so that a spectrum comprising a plurality of band-like beams of prescribed widths is generated. A light detection sensor 24 comprises a plurality of sensor elements for measuring the emission intensity of the band-like beams in the width direction and the wavelength direction. The light-detecting sensor 24 is provided with a plurality of sensor elements arranged in a plurality of lines parallel to each other, and the array of a plurality of sensor elements of the plurality of lines diagonally crosses the width direction of the band-like beam. COPYRIGHT: (C)2004,JPO