| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost and moisture-resistant transparent electrically conductive film which uses alternate lamination of dielectric layers and Ag-Nd alloy layers wherein nitride is used for the dielectric. SOLUTION: The transparent electrically conductive film is formed by laminating the dielectric layers and the Ag-Nd alloy layers alternatively on a surface of a substrate in this order wherein the nitride is used for the dielectric. For example, in a case that seven layers that are AlN<SB>×</SB>(36nm)/AgNd(N)(17.5nm)/AlN<SB>×</SB>(74nm)/AgNd(N)(17.5nm)/AlN<SB>×</SB>(74nm)/AgNd(N)(17.5nm)/AIN<SB>×</SB>(38nm)(numerical values in parentheses show thicknesses of the layers) are laminated on a glass substrate, electromagnetic shielding of 40dB or more is obtained for electromagnetic wave whose frequency is 30 to 1000 MHz. COPYRIGHT: (C)2004,JPO
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