| 摘要 |
PROBLEM TO BE SOLVED: To provide a microchip having a micropump easy to manufacture, with improved degree of freedom of design of the micropump. SOLUTION: This microchip forms passages 32a, 32b; 34a, 34b and pump chambers 33a and 33b for allowing fluid to flow to the passages 32a, 32b; 34a, 34b on the inside of a body. A movable part 33x is formed between the pump chambers 33a and 33b and a body outside surface. The movable part 33x is driven by external driving sources 9a and 9b separate from the microchip. COPYRIGHT: (C)2004,JPO
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