Triaxial acceleration sensor

摘要

A triaxial acceleration sensor comprises an inertial mass suspended in three orthogonal directions by support members in a statically determinate structure. Acceleration applied to the inertial mass generates loading forces that stress the support members either in tension or in compression. The stress levels are thus a measure of the applied acceleration. In an embodiment of this invention, the support members are force-sensitive resonators whose resonant frequencies of oscillation are related to the stresses in the members. The resonant frequencies are thus a measure of the complete three-dimensional vector of the applied acceleration.