METHOD OF PRODUCING MICRO-STRUCTURE, METHOD OF PRODUCING LIQUID DISCHARGE HEAD, AND LIQUID DISCHARGE HEAD PRODUCED THEREBY

摘要

PROBLEM TO BE SOLVED: To provide a method of producing a liquid flow path shape capable of refilling ink at high speed by optimizing a three-dimensional shape of the liquid flow path and suppressing the vibration of a meniscus, and also to provide a method of producing a liquid discharge head.

SOLUTION: A pattern to be the liquid flow path to be formed on a substrate 2011 with a heater is formed by a positive photosensitive material in a two-layered structure of upper and lower layers, with the lower layer used for forming the liquid flow path after being thermally crosslinked.

COPYRIGHT: (C)2004,JPO