| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an oxide transparent conductive film excellent in permeability not only in the visual radiation range, but also in infrared radiation range and having low resistant value. <P>SOLUTION: Indium oxide is contained as the essential component, and the indium in the indium oxide is substituted into tungsten with the ratio of 0.019-0.034 tungsten/indium in the rate of atom numbers, and the indium oxide is single crystal. In the other way, film-formation is formed by spattering, and crystallized indium oxide is contained as essential component and in the oxide transparent conductive film containing the tungsten, substantially the whole tungsten is substituted to the indium in the indium oxide. <P>COPYRIGHT: (C)2004,JPO</p> |
