| 摘要 |
PROBLEM TO BE SOLVED: To provide a vertial-type probe card which does not cause problems such as leakage and short circuits among probes, when making a circuit highly integrated. SOLUTION: The vertical-type probe card A has a probe 200 for contacting with an electrode 10 of a semiconductor integrated circuit B and a support board 300 for supporting the probe 200. The probe 200 has a board end 210 inserted into a through-hole 310 of the support board 300; a contact part 220 bent so as to run along extending from the board end 210 to the rear surface 320 of the support board 300 and to contact with the rear surface 320; an inclination part 230 bent diagonally downward from the contact part 220 so that a predetermined spaceαis formed between the support board 300 and the surface 320; and a tip 240 bent downward from the inclination part 230. COPYRIGHT: (C)2004,JPO
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