| 摘要 |
PROBLEM TO BE SOLVED: To deal with an increase in the recording density by making the protective film thin≤about 40Åfor an MR thin film magnetic head that can cope with recording density and drastically reducing the spacing loss in a large-capacity magnetic recording medium. SOLUTION: In a magnetoresistive effect type thin film head, a lower layer selected from a thin film having composition (A) expressed by formula (i) and formula (ii) represented by an atom ratio and an upper layer of a diamond-like thin film having composition (B) expressed by formula (iii) are formed on a surface where at least the head is brought into contact with a recording medium, and the whole thickness of the lower and upper layers is≤40Å. The thin film head, its manufacturing method and a magnetic head device using the thin film head are provided. Here, the formula (i) is SiC<SB>X</SB>H<SB>Y</SB>O<SB>Z</SB>N<SB>W</SB>F<SB>T</SB>B<SB>U</SB>R<SB>V</SB>(X = 0.5 to 26, Y = 0.5 to 13, Z = 0 to 6, W = 0 to 6, T = 0 to 6, U = 0 to 1 and V = 0 to 1, here). The formula (ii) is SiH<SB>Y</SB>O<SB>Z</SB>N<SB>W</SB>F<SB>T</SB>B<SB>U</SB>P<SB>V</SB>(Y = 0.0001 to 0.7, Z = 0 to 6, W = 0 to 6, T = 0 to 6, U = 0 to 1 and V = 0 to 1). The formula (iii) is CH<SB>a</SB>O<SB>b</SB>N<SB>c</SB>F<SB>d</SB>B<SB>e</SB>P<SB>f</SB>(a = 0 to 0.7, b = 0 to 1, c = 0 to 1, d = 0 to 1, e = 0 to 1 and f = 0 to 1). COPYRIGHT: (C)2004,JPO
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