| 摘要 |
PROBLEM TO BE SOLVED: To quantitatively evaluate orientation by using one diffraction peak without depending on measuring apparatus and measurement conditions, and to clearly grasp the degree of orientation regardless of weak orientation. SOLUTION: An axisymmetric orientation density distribution functionρis assumed around a normal direction to the surface of a polycrystalline material 12. The functionρis a Gaussian function or a March-Dollase function. X rays 10 enter the surface of a sample 12 at an incident angleαfor measuring intensity in diffracted X rays 14, the incident angleαis changed for obtaining a change in the intensity in the diffracted X rays 14, and a measurement rocking curve is obtained. In the mean time, theoretical diffraction X ray intensity is calculated based on the orientation density distribution functionρ, and the characteristic parameter of the orientation density distribution function is obtained so that the theoretical rocking curve approaches the measurement rocking curve most. As a result, the orientation density distribution functionρcan be determined, and the degree of orientation can be quantitatively evaluated. COPYRIGHT: (C)2004,JPO
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