METHOD FOR REFINING HIGH-PURITY DIMETHYL SULFOXIDE AND MIXTURE OF DIMETHYL SULFOXIDE WITH AMINES

摘要

PROBLEM TO BE SOLVED: To provide a method for inexpensively and efficiently refining a high-purity DMSO and a mixture of DMSO with amines such as MEA from DMSO industrially widely used as a specific cleaning solution, a specific releasing solution, etc., used for treatment of electronic material and the mixture of DMSO with amines such as MEA. SOLUTION: The high-purity dimethyl sulfoxide containing≥95% dimethyl sulfoxide or the mixture of dimethyl sulfoxide with amines containing≥65% amines is separated or recovered by distillation from the mixture containing the dimethyl sulfoxide and the amines to refine the high-purity dimethylsulfoxide and the mixture of the dimethyl sulfoxide with amines. COPYRIGHT: (C)2004,JPO