| 摘要 |
PROBLEM TO BE SOLVED: To provide a molecular contamination monitoring system capable of tracing molecular contamination states at product levels over the whole manufacturing processes. SOLUTION: The molecular contamination monitoring system comprises a process device for applying the processing of a prescribed manufacturing process to material substrates, a storing/carrying container detachably attached to the process device and capable of storing/carrying the material substrates, a molecular contamination sensor arranged in the storing/carrying container and having a quartz oscillator and an output circuit for outputting the frequency information of the quartz oscillator, and a reader for reading out the frequency information from the sensor and the identification information of the sensor when the storing/carrying container is attached to the process device. Since the oscillation frequency of the quartz oscillator is changed by adhesion of contaminated molecules to the quartz oscillator, the contaminated state of the material substrates in the storing/carrying container can be monitored on the basis of the frequency information and the identification information. COPYRIGHT: (C)2004,JPO |
