| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a liquid substance injecting method and an apparatus therefor for obtaining a coating film having uniform thickness and a small distribution of the film thickness and wasting less a liquid substance to be applied to increase the use efficiency. <P>SOLUTION: The method of injecting liquid substance is carried out by injecting a liquid substance through the nozzle of a liquid drop injection head and applying the liquid substance to a substrate to be rotated by a spin coater or a substrate already rotated. In this method, the substrate is divided into at least two regions of an inner region and an outer region along a circumference located at a specified distance from the rotation center of the substrate. The amount of injection of the liquid substance in the inner region is controlled to be larger than the amount of injection of the liquid substance in the outer region. <P>COPYRIGHT: (C)2004,JPO |
