| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck device operable over a long time without stopping processing for cleaning filters of the vacuum chuck device. SOLUTION: Independent two systems are connected in parallel to a sucking part 12 of a work 10 as a negative pressure supply system. The filters 21 and 31 are arranged in the respective negative pressure supply systems. The filters are cleaned when resting one negative pressure supply system. The vacuum chuck device 11 can be operated by actively switching the other negative pressure supply system. COPYRIGHT: (C)2004,JPO
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