发明名称 OPTICAL SEMICONDUCTOR DEVICE AND OPTICAL APPARATUS PROVIDED WITH THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device reduced in the number of processes without the deterioration of reflectivity of light, and provide an optical apparatus provided with such a semiconductor device. SOLUTION: In a region S where the light-receiving surface of a photodiode is located, respective layers are removed when first wiring 15 and second wiring 17 are patterned and respective layers are also removed after a second interlayer insulation film 13 and a cover insulation film 18 are formed, respectively. Meanwhile, an insulation film 20 for protection is not removed by etching in the region S, where the light-receiving surface of the photodiode is positioned, and an antireflection film 16 is covered with the protective insulation film 20. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004047544(A) 申请公布日期 2004.02.12
申请号 JP20020200022 申请日期 2002.07.09
申请人 SHARP CORP 发明人 HOSOKAWA MAKOTO;TAKIMOTO TAKAHIRO;KASAMATSU TOSHIMITSU
分类号 H01L27/14;H01L27/146;H01L29/04;H01L31/02;H01L31/036;H01L31/0376;H01L31/10;H01L31/12;H01L31/20;(IPC1-7):H01L27/14 主分类号 H01L27/14
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