| 摘要 |
PROBLEM TO BE SOLVED: To provide a simple clean booth that suppresses noise, realizes a cleaner isolated space, is safe, and is clean in handling during maintenance. SOLUTION: Sterilization by a sterilization lamp 24 is enabled and pressure loss can be reduced by making HEPA filters 22 of fluorocarbon resin, so that the noise is suppressed and the cleaner isolated space A can be provided. The HEPA filters 22 are sterilized by the sterilization lamp 24, so that the handling during maintenance can be performed cleanly. The length and mounting position of a base angle 21 are determined with reference to the position G1 of the center of gravity of air cleaning unit 2 in a horizontally extended state of a top surface frame 3, so that risk of an accident due to falling during movement is also reduced. COPYRIGHT: (C)2004,JPO
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