| 摘要 |
PROBLEM TO BE SOLVED: To easily realize an adjustment of setting positions of a mask of large size and an outer frame in a short time in a mask coating. SOLUTION: In the coupling capable of shaking a head and sliding in a longitudinal direction, a leg rod for fixing the mask of large size to the outer frame can be fine-controlled in a whole horizontal/vertical direction. COPYRIGHT: (C)2004,JPO
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