PHYSICAL QUANTITY DETECTOR

摘要

PROBLEM TO BE SOLVED: To provide a physical quantity detector which can realize miniaturization and high precision of a pressure sensor. SOLUTION: In the physical quantity detector, a strain generating part (2) as a diaphragm is formed, by forging alloy of composition for forming metal glass which has a supercooled liquid region whose main component is Zr or Ti or Pd, in the supercooled liquid region. An insulating film (7) is formed on the surface of the strain generating part (2). A strain gauge (8) of a metal or semiconductor thin film is formed on the insulating film (7). COPYRIGHT: (C)2004,JPO