| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively provide a sealed container opening/closing device with a simplified structure wherein it is easily mounted on a processing apparatus and adjusted, and a time required for the mounting and adjustment can be shortened. SOLUTION: The sealed container opening/closing device 10 is configured such that a door holder 30 for holding a shielding door 62 for shielding an opening 61 in a sealed container (FOUP) 60 for containing a plurality of substrates and a port plate 25 are separated to open and close the shielding door 62 by relatively moving the door holder 30 and the port plate 25 having an opening 26 for bringing the opening 61 in the sealed container 60 into abutment to communicate it to the interior of a processing apparatus. In the sealed container opening/closing device 10, there are provided a common door holder 30 for simultaneously holding a plurality of the shielding doors 62 for shielding a plurality of the opening sections 61 of a plurality of the closed containers 60 arranged horizontally, a common door holder moving means (door holder horizontal moving means 32, and door holder elevating means 50) for moving the common door holder 30 to the port plate 25. COPYRIGHT: (C)2004,JPO |
