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发明名称
Katadioptrisches optisches System und Projektionsbelichtungsvorrichtung mit einem solchen System
摘要
申请公布号
DE60001691(T2)
申请公布日期
2004.02.12
申请号
DE20006001691T
申请日期
2000.07.13
申请人
NIKON CORP., TOKIO/TOKYO
发明人
SUENAGA, YUTAKA;MIYASHITA, TOMOHIRO;YAMAGUCHI, KOTARO
分类号
G02B17/08;G03F7/20;H01L21/027;(IPC1-7):G02B17/08
主分类号
G02B17/08
代理机构
代理人
主权项
地址
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