发明名称 |
Probe station having multiple enclosures |
摘要 |
A probe station for probing a test device has a chuck element for supporting the test device. An electrically conductive outer shield enclosure at least partially encloses such chuck element to provide EMI shielding therefor. An electrically conductive inner shield enclosure is interposed between and insulated from the outer shield enclosure and the chuck element, and at least partially encloses the chuck element.
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申请公布号 |
US2004027144(A1) |
申请公布日期 |
2004.02.12 |
申请号 |
US20030615724 |
申请日期 |
2003.07.08 |
申请人 |
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发明人 |
PETERS RON A.;HAYDEN LEONARD A.;HAWKINS JEFFREY A.;DOUGHERTY R. MARK |
分类号 |
G01R31/26;G01R1/04;G01R1/06;G01R31/28;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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