发明名称 |
MEMS AND METHOD OF MANUFACTURING MEMS |
摘要 |
The present invention relates to micro electro-mechanical systems (MEMS) and production methods thereof, and more particularly to vertically integrated MEMS systems. Manufacturing of MEMS and vertically integrated MEMS is facilitated by forming, preferably on a wafer level, plural MEMS on a MEMS layer selectively bonded to a substrate, and removing the MEMS layer intact. |
申请公布号 |
WO03016205(A3) |
申请公布日期 |
2004.02.12 |
申请号 |
WO2002US26090 |
申请日期 |
2002.08.15 |
申请人 |
REVEO, INC.;FARIS, SADEG, M. |
发明人 |
FARIS, SADEG, M. |
分类号 |
B81B7/02;B81C1/00;H01L23/52;H01L49/00 |
主分类号 |
B81B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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