| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for discharging a liquid-like substance which has small film thickness distribution, which obtains a coating film having a uniform thickness and which reduces the waste of the substance for coating, to enhance using efficiency. <P>SOLUTION: In the method and the apparatus for discharging the liquid-like substance, by discharging the substance from a nozzle of a liquid droplet discharging head and coating a substrate with the substance, when the coated region of the substrate is divided into at least two, the amount of discharged substance to one of the divided regions is controlled to be increased as compared with the divided other regions. <P>COPYRIGHT: (C)2004,JPO |
